1、主要测试内容
VCSEL 测试、倒装晶圆Micro LED 测试、PD 测试、光通讯 VCSEL
温度控制、定制化光学测试、定制化测试软件
2、丰富的样品测试类型
Wafer、Die、Chip、Packaged、Panel
3、自动化柔性配置
半自动、全自动
4、丰富的自动化上下料选件
Wafer with Gel-Pak、Wafer with Board、Wafer with Board (Small)
大规模倒装晶圆测试
VEGA FP80-C1 Semi Auto Wafer Prober | |
Material handling capability | |
Wafer Size | 2” ~ 8” |
X movement | |
Travel | 215 mm |
Resolution | 0.1 mm |
Repeatability | ± 4 mm |
Y movement | |
Travel | 240 mm |
Resolution | 0.1 mm |
Repeatability | ± 4 mm |
Z movement | |
Travel | 100 mm |
Resolution | 0.1 mm |
Repeatability | ± 4 mm |
Theta movement | |
Travel | ±11º |
Resolution | 0.000112345º |
Chuck system | |
Type | Glass chuck / hollow chuck |
Size | Up to 8” |
Material | Aluminum plated nickel / gold |
Vacuum type | Multi-hole / groove |
Control system | |
Main system | Industrial PC-based system |
Operating system | Windows 10 |
Display Interface | 22” TFT-LCD monitor |
Operating Interface | PC keyboard and mouse |
Vision alignment system | |
Camera | Mono 5 megapixels |
Objective lens options | 2x / 10x |
Lighting source | Co-axial light |
Tester interface | |
Connecting interface | TTL with SOT / EOT |
Address output interface | RS232C |
Bin grade number | Pass / fail |
Operation interface | |
Basic operation mode | Operator / engineer / administrator |
Advanced operation | NG chip re-test |
Probing type | Full test / sampling test |
Optional accessories | |
Options1 | Probe card holder, MP25 positioner, motorized stage, edge sensor, ink actuator, HEPA, Thermal air module with PCH adaptor |
Physical specifications | |
Dimensions2 | Width: 1050 mm (41.3 in) Depth: 1150 mm (45.2 in) Height: 1950 mm (76.7 in) |
Weight | 750 kg (1653 lb) |
Facility requirement | |
Power input | 110V / 220 VAC, 50/60 Hz |
Power consumption | 800 VA |
Vacuum | < -70 kpa @ 10 LPM flow rate |
Clean dry air (CDA) | 4~6 kg / cm2 @ 2 LPM flow rate |
Temperature | |
Operating range | 19oC ~ 24oC |
Target temperature | 22oC |
Temp. variation | 1K |
Humidity | |
Tool area | 25% ~ 60% |
Support equipment area | 25% ~ 60% |
Cleanroom standard | |
Cleanroom class | Class 10000 |
Vibration level | |
Vibration | For proper operation of the probe system, the environment should not exceed vibrations of ISO Operating Theatre Level |
Warranty | |
Warranty period | One (1) year starting from the date of delivery |